Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2020 / 01 Vol. 38; Iss. 1
Mueller matrix ellipsometry study of a circular polarizing filter
Hong, Nina, Hilfiker, James N.Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5129691
Date:
January, 2020
File:
PDF, 5.96 MB
2020