Mechanistic Understanding of Material Detachment During CMP Processing
Che, Wei, Guo, Yongjin, Bastawros, Ashraf, Chandra, AbhijitVolume:
732
Year:
2002
Journal:
MRS Proceedings
DOI:
10.1557/PROC-732-I4.3
File:
PDF, 1.62 MB
2002