Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows
Clarence L. Chang, John E. Carlstrom, Aaron Datesman, Stephan S. Meyer, Valentyn Novosad, Volodymyr G. Yefremenko, Tom Crawford, Tom Downes, Jeff McMahon, Kathryn Miknaitis, Joaquin D. VieiraVolume:
151
Language:
english
Pages:
4
DOI:
10.1007/s10909-007-9639-8
Date:
April, 2008
File:
PDF, 326 KB
english, 2008