Properties of Tungsten Thin Films Produced with

Journal of Low Temperature Physics 2008 / 04 Vol. 151; Iss. 1-2

Properties of Tungsten Thin Films Produced with

S. Roth, C. Ciemniak, C. Coppi, F. v. Feilitzsch, A. Gütlein, C. Isaila, J.-C. Lanfranchi, S. Pfister, W. Potzel, W. Westphal
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Volume:
151
Language:
english
Pages:
7
DOI:
10.1007/s10909-007-9642-0
Date:
April, 2008
File:
PDF, 280 KB
english, 2008
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