Grain size and recrystallization of TiN, ZrN, NbN, and CrN...

Thin Solid Films 1995 / 6 Vol. 261; Iss. 1-2

Grain size and recrystallization of TiN, ZrN, NbN, and CrN alloyed and multilayer films

Andrievski, R
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Volume:
261
Journal:
Thin Solid Films
DOI:
10.1016/0040-6090(95)06525-3
Date:
June, 1995
File:
PDF, 328 KB
1995
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