Synthesis, oxide formation, properties and thin film transistor properties of yttrium and aluminium oxide thin films employing a molecular-based precursor route
Koslowski, Nico, Hoffmann, Rudolf C., Trouillet, Vanessa, Bruns, Michael, Foro, Sabine, Schneider, Jörg J.Volume:
9
Year:
2019
Journal:
RSC Advances
DOI:
10.1039/c9ra05348d
File:
PDF, 1.34 MB
2019