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Local atomic order of the amorphous TaO x thin films in relation to their chemical resistivity
Lawniczak-Jablonska, Krystyna, Wolska, Anna, Kuzmiuk, Piotr, Rejmak, Pawel, Kosiel, KamilVolume:
9
Year:
2019
Journal:
RSC Advances
DOI:
10.1039/c9ra07318c
File:
PDF, 876 KB
2019