[AIP The CAARI 2000: Sixteenth international conference on the application of accelerators in research and industry - Denton, Texas (USA) (1-5 Nov 2000)] AIP Conference Proceedings - A two-step annealing of shallow junctions formed by GeB[sup −] cluster ion implantation of Si
Lu, XinmingVolume:
576
Year:
2001
DOI:
10.1063/1.1395469
File:
PDF, 856 KB
2001