Micro-Mechanism of Silicon-Based Waveguide Surface...

Chinese Physics Letters 2016 / 12 Vol. 33; Iss. 12

Micro-Mechanism of Silicon-Based Waveguide Surface Smoothing in Hydrogen Annealing

Duan, Qian-Qian, Ren, Xin-Yu, Jian, Ao-Qun, Zhang, Hui, Ji, Jian-Long, Zhang, Qiang, Zhang, Wen-Dong, Sang, Sheng-Bo
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Volume:
33
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/33/12/126801
Date:
December, 2016
File:
PDF, 3.92 MB
2016
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