Focused ion beam milling for the fabrication of 160 nm...

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Flexible and Printed Electronics 2019 / 12

Focused ion beam milling for the fabrication of 160 nm channel length IGZO TFTs on flexible polymer substrates

Münzenrieder, Niko, Shorubalko, Ivan, Petti, Luisa, Cantarella, Giuseppe, Bajramshahe, Shkodra, Meister, Tilo, Ishida, Koichi, Carta, Corrado, Ellinger, Frank, Tröster, Gerhart
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Journal:
Flexible and Printed Electronics
DOI:
10.1088/2058-8585/ab639f
Date:
December, 2019
File:
PDF, 3.61 MB
2019
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