Capacitive Sensing and Electrostatic Control System Design...

IEEE Access 2020 Vol. 8

Capacitive Sensing and Electrostatic Control System Design and Analysis With a Torsion Pendulum

Wang, Yukun, Qi, Keqi, Wang, Shaoxin, Li, Wei, Li, Zhe, Wang, Zhi
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Volume:
8
Year:
2020
Journal:
IEEE Access
DOI:
10.1109/ACCESS.2019.2961761
File:
PDF, 2.10 MB
2020
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