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A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization
Peng, Bo, Hu, Kai-Ming, Shao, Lei, Yan, Han, Li, Lei, Wei, Xueyong, Zhang, Wen-MingYear:
2019
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2958427
File:
PDF, 3.61 MB
2019