[IEEE 2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Polyana, Ukraine (2019.5.22-2019.5.26)] 2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Influence of Fringing Field on Estimating of Comb-Drive Accelerometer Performance

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