![](/img/cover-not-exists.png)
Temperature-dependence of Cl 2 /Ar ICP-RIE of polar, semipolar, and nonpolar GaN and AlN following BCl 3 /Ar breakthrough plasma
Shah, Amit P., Azizur Rahman, A, Bhattacharya, ArnabVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5123787
Date:
January, 2020
File:
PDF, 1.34 MB
2020