Low-Temperature Deposition of Silicon Nitride Films Using...

ECS Journal of Solid State Science and Technology 2019 Vol. 8; Iss. 11

Low-Temperature Deposition of Silicon Nitride Films Using Ultraviolet-Irradiated Ammonia

Shiba, Yoshinobu, Teramoto, Akinobu, Suwa, Tomoyuki, Ishii, Katsutoshi, Shimizu, Akira, Umezawa, Kota, Kuroda, Rihito, Sugawa, Shigetoshi
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Volume:
8
Year:
2019
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0131911jss
File:
PDF, 724 KB
2019
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