The Influence of Microstructure on Nanomechanical and...

Frontiers in Materials 2019 / 12 Vol. 6

The Influence of Microstructure on Nanomechanical and Diffusion Barrier Properties of Thin PECVD SiOx Films Deposited on Parylene C Substrates

Framil, David, Van Gompel, Matthias, Bourgeois, Florian, Furno, Ivo, Leterrier, Yves
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Volume:
6
Journal:
Frontiers in Materials
DOI:
10.3389/fmats.2019.00319
Date:
December, 2019
File:
PDF, 923 KB
2019
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