Single photomask lithography for shape modulation of...

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Journal of Industrial & Engineering Chemistry 2020 / 1

Single photomask lithography for shape modulation of micropatterns

Lee, Sang Hun, Seo, Sung Eun, Kim, Kyung Ho, Lee, Jiyeon, Park, Chul Soon, Jun, Bong-Hyun, Joo Park, Seon, Kwon, Oh Seok
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Journal:
Journal of Industrial and Engineering Chemistry
DOI:
10.1016/j.jiec.2019.12.034
Date:
January, 2020
File:
PDF, 2.61 MB
2020
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