[IEEE 2018 4th IEEE International Conference on Emerging Electronics (ICEE) - Bengaluru, India (2018.12.17-2018.12.19)] 2018 4th IEEE International Conference on Emerging Electronics (ICEE) - Optimization of platinum thin film as a bottom electrode for aluminum nitride thin films using Plackett-Burman statistical approach
Jadhav, Shubham, Singh, Babusha, Chandorkar, Saurabh, Pratap, RudraYear:
2018
DOI:
10.1109/icee44586.2018.8937951
File:
PDF, 397 KB
2018