Elastic Scattering of Neutral Fluorine on Si, O, C, and H...

Technical Physics Letters 2019 / 12 Vol. 45; Iss. 12

Elastic Scattering of Neutral Fluorine on Si, O, C, and H Atoms in the Range of the Relative Kinetic Energies of 2–200 eV

Palov, A., Zhang, Jing, Baklanov, M., Wei, Shuhua
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Volume:
45
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785019120113
Date:
December, 2019
File:
PDF, 597 KB
2019
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