Vapor-phase Surface Cleaning of Electroplated Cu Films...

ECS Transactions 2019 / 07 Vol. 92; Iss. 2

Vapor-phase Surface Cleaning of Electroplated Cu Films Using Anhydrous N 2 H 4

Hwang, Su Min, Peña, Luis Fabián, Tan, Kui, Kim, Harrison Sejoon, Kondusamy, Aswin L. N., Qin, Zhiyang, Jung, Yong Chan, Veyan, Jean-Francois, Alvarez, Daniel, Spiegelman, Jeff, Kim, Jiyoung
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Volume:
92
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/09202.0265ecst
Date:
July, 2019
File:
PDF, 410 KB
english, 2019
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