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High-throughput fabrication of polymethylmethacrylate nano-hole arrays for structural coloration using proton beam writing made diamond stamp
Gong, Jintao, Ansari, Kambiz, Jin, Huining, van Kan, Jeroen A.Volume:
222
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2020.111213
Date:
February, 2020
File:
PDF, 13.65 MB
english, 2020