Area-selective ALD of Ru on nm-scale Cu lines through...

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Area-selective ALD of Ru on nm-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films.

Zyulkov, Ivan, Madhiwala, Viraj, Voronina, Ekaterina N., Snelgrove, Matthew, Bogan, Justin, O'Connor, Robert, De Gendt, Stefan, Armini, Silvia
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.9b14596
Date:
January, 2020
File:
PDF, 995 KB
english, 2020
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