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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - MIND+ system; More universal dose patterns by single-step ion implantation
Okamoto, Yasuharu, Ninomiya, Shiro, Ochi, Akihiro, Ueno, Yusuke, Yamada, Tatsuya, Kimura, Yasuhiko, Kudo, Tetsuya, Koike, Masazumi, Suetsugu, Noriyuki, Ookita, Yoshiaki, Tsukihara, Mitsukuni, Sato, FuYear:
2012
Language:
english
DOI:
10.1063/1.4766560
File:
PDF, 772 KB
english, 2012