Design and Characterization of 3-Stack MEMS-Based Passive...

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Design and Characterization of 3-Stack MEMS-Based Passive Flow Regulators for Implantable and Ambulatory Infusion Pumps

Dumont-Fillon, Dimitry, Lamaison, Damien, Chappel, Eric
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Year:
2020
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2962107
File:
PDF, 3.37 MB
english, 2020
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