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Electronic excitation induced modifications in surface morphological, optical and physico-chemical properties of ALD grown nanocrystalline Al2O3 thin film

Chauhan, Vishnu, Kumar, Rajesh
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Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2020.106389
Date:
January, 2020
File:
PDF, 6.18 MB
2020
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