Cubic-structure Al-rich TiAlSiN thin films grown by hybrid...

Surface and Coatings Technology 2020 / 03 Vol. 385

Cubic-structure Al-rich TiAlSiN thin films grown by hybrid high-power impulse magnetron co-sputtering with synchronized Al+ irradiation

Wu, Zhengtao, Wang, Qimin, Petrov, Ivan, Greene, J.E., Hultman, Lars, Greczynski, Grzegorz
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Volume:
385
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.125364
Date:
March, 2020
File:
PDF, 12.38 MB
2020
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