Chemically vapor deposited polymer nanolayers for rapid and...

Chemically vapor deposited polymer nanolayers for rapid and controlled permeation of molecules and ions

Gleason, Karen K.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5132851
Date:
March, 2020
File:
PDF, 6.41 MB
2020
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