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A Super-responsive Tip-Tilt Motion Control of a Mirror Driven by Electromagnetic Force and Supported by an Elastic Rod Made of Super Elastic Alloy; 超弾性ロッドで支持されたミラーの電磁力による超高応答チルト制御;
AKENO, Kouki, SHIMIZU, Daisuke, SHINSHI, Tadahiko, KODEKI, Kazuhide, FUKUSHIMA, KazuhikoVolume:
84
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.84.443
Date:
May, 2018
File:
PDF, 3.86 MB
2018