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Sensors and Actuators A: Physical 2020 / 1

Effect of cations on silicon anisotropic etching process in solutions containing TMAH and TMAH with tensioactive compounds

Zubel, Irena
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Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.111829
Date:
January, 2020
File:
PDF, 4.69 MB
2020
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