Experimental study of a low-pressure hybrid RF discharge

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Experimental study of a low-pressure hybrid RF discharge

Kralkina, Elena, Nekliudova, Polina, Pavlov, Vladimir, Vavilin, Konstantin, Zadiriev, Ilya, Zhao, Chen
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Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/ab69bd
Date:
January, 2020
File:
PDF, 806 KB
2020
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