Experimental study of a low-pressure hybrid RF discharge
Kralkina, Elena, Nekliudova, Polina, Pavlov, Vladimir, Vavilin, Konstantin, Zadiriev, Ilya, Zhao, ChenJournal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/ab69bd
Date:
January, 2020
File:
PDF, 806 KB
2020