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Back‐End‐of‐Line Compatible Low Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation
Lehninger, David, Olivo, Ricardo, Ali, Tarek, Lederer, Maximilian, Kämpfe, Thomas, Mart, Clemens, Biedermann, Kati, Kühnel, Kati, Roy, Lisa, Kalkani, Mahsa, Seidel, KonradJournal:
physica status solidi (a)
DOI:
10.1002/pssa.201900840
Date:
January, 2020
File:
PDF, 526 KB
2020