Mathematical modeling based on contact mechanism due to...

Journal of Mechanical Science and Technology 2020 / 1 Vol. 34; Iss. 1

Mathematical modeling based on contact mechanism due to elastic and plastic deformation of pad asperities during CMP

Kim, Hyunjin, Shin, Somin, Lee, Dasol, Jeong, Haedo
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Volume:
34
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-019-1230-0
Date:
January, 2020
File:
PDF, 1.94 MB
2020
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