Integrated design of piezo-actuated 2-DOF...

Mechanical Systems and Signal Processing 2020 / 05 Vol. 139

Integrated design of piezo-actuated 2-DOF submillimeter-range super-resolution platform with self-sensing unit

Liao, Cheng, Xu, Minglong, Xiao, Ruijiang, Han, Wenwen
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Volume:
139
Journal:
Mechanical Systems and Signal Processing
DOI:
10.1016/j.ymssp.2019.106569
Date:
May, 2020
File:
PDF, 4.42 MB
2020
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