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On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches
Birmpiliotis, Dimitris, Stavrinidis, George, Koutsoureli, Matroni, Konstantinidis, George, Papaioannou, GeorgeYear:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2962068
File:
PDF, 2.92 MB
2020