Graphene-like film CVD on e-beam exposed SiO...

Fullerenes Nanotubes and Carbon Nanostructures 2020 / 01

Graphene-like film CVD on e-beam exposed SiO 2 /Si by the pyrolysis of different oxygen-containing precursors

Sedlovets, Daria M., Knyazev, Maxim A., Trofimov, Oleg V., Koveshnikov, Sergei V.
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Language:
english
Journal:
Fullerenes, Nanotubes and Carbon Nanostructures
DOI:
10.1080/1536383X.2019.1708731
Date:
January, 2020
File:
PDF, 1.30 MB
english, 2020
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