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Spectral Analysis of Frictional Forces in ILD CMP
Philipossian, Ara, Rosales-Yeomans, Daniel, Charns, Leslie, Rogers, Chris, Doy, Toshiroh, Kinoshita, MasaharuVolume:
767
Year:
2003
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-767-F1.11
File:
PDF, 119 KB
english, 2003