On-Chip Electrostatically Actuated Bending Tests for the...

Meccanica 2005 / 12 Vol. 40; Iss. 4-6

On-Chip Electrostatically Actuated Bending Tests for the Mechanical Characterization of Polysilicon at the Micro Scale

Alberto Corigliano, Fabrizio Cacchione, Biagio De Masi, Caterina Riva
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Volume:
40
Language:
english
Pages:
19
DOI:
10.1007/s11012-005-2135-9
Date:
December, 2005
File:
PDF, 677 KB
english, 2005
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