J161021 Mechanical property dependence on cross-linked...

J161021 Mechanical property dependence on cross-linked ratio of epoxy-based negative photoresist

UESUGI, Akio, MAKINO, Yoshihide, YAGYU, Hiromasa, HIRAI, Yoshikazu, SUGANO, Koji, TSUCHIYA, Toshiyuki, TABATA, Osamu
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Volume:
2011
Year:
2011
Language:
english
Journal:
The Proceedings of Mechanical Engineering Congress, Japan
DOI:
10.1299/jsmemecj.2011._j161021-1
File:
PDF, 555 KB
english, 2011
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