Plasma etching of wide bandgap and ultrawide bandgap...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 03 Vol. 38; Iss. 2

Plasma etching of wide bandgap and ultrawide bandgap semiconductors

Pearton, Stephen J., Douglas, Erica A., Shul, Randy J., Ren, Fan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5131343
Date:
March, 2020
File:
PDF, 4.57 MB
2020
Conversion to is in progress
Conversion to is failed