Calibrating a scanning electron microscope in two...

Calibrating a scanning electron microscope in two coordinates by the use of one certified dimension

Ch. P. Volk, Yu. A. Novikov, A. V. Rakov, P. A. Todua
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Volume:
51
Language:
english
Pages:
4
DOI:
10.1007/s11018-008-9086-1
Date:
June, 2008
File:
PDF, 141 KB
english, 2008
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