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Measurement of linear dimensions of pattern elements of micro- and nano-structures under high- and low-voltage scanning electron microscopes
Ch. P. Volk, Yu. A. Novikov, A. V. Rakov, P. A. ToduaVolume:
52
Language:
english
Pages:
6
DOI:
10.1007/s11018-009-9217-3
Date:
January, 2009
File:
PDF, 152 KB
english, 2009