[IEEE 2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Genting Highland, Pahang, Malaysia (2019.8.21-2019.8.23)] 2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Effect of Target Voltage on Tribological and Adhesive Properties of c-BN Films Coated with HiPIMS

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