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Minimization of the effect of temperature on thin-film nano- and microelectromechanical systems and pressure sensors based on them
E. M. Belozubov, V. A. Vasil’ev, N. V. GromkovVolume:
52
Language:
english
Pages:
6
DOI:
10.1007/s11018-009-9364-6
Date:
August, 2009
File:
PDF, 324 KB
english, 2009