Study on SOI structure irradiated by electron and annealled treatment using C–V, FTIR and PL
Zhu, Jiayu, Li, Yun, Wang, Shaomin, Wang, Hongxia, Gong, Min, Huang, Mingmin, Ma, Yao, Yang, ZhimeiVolume:
139
Language:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2020.106393
Date:
March, 2020
File:
PDF, 1.90 MB
english, 2020