[IEEE 2019 7th International Engineering, Sciences and Technology Conference (IESTEC) - Panama, Panama (2019.10.9-2019.10.11)] 2019 7th International Engineering, Sciences and Technology Conference (IESTEC) - Effect of Nitrogen Flow on the Growth of Nitrogen Ultrananocrystalline Diamond (N-UNCD) Films on Si/SiO2/HfO2 Substrate

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