Molecular Layer Etching of Metalcone Films Using Lithium...

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Chemistry of Materials 2020 / 01

Molecular Layer Etching of Metalcone Films Using Lithium Organic Salts and Trimethylaluminum

Young, Matthias J., Choudhury, Devika, Letourneau, Steven, Mane, Anil, Yanguas-Gil, Angel, Elam, Jeffrey W.
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Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.9b03627
Date:
January, 2020
File:
PDF, 655 KB
english, 2020
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