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The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors
Shanenkov, I, Sivkov, A, Ivashutenko, A, Shanenkova, YuVolume:
93
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/93/1/012051
Date:
October, 2015
File:
PDF, 1.02 MB
english, 2015