Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
2005 Vol. 2005.3
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A Picometer Positioning System using Active Aerostatic Guideway(Precision positioning and control technology)
MIZUMOTO, Hiroshi, YABUTA, Yoshito, ARII, Shiroh, Tazoe, Yoichi, KAMI, YoshihiroVolume:
2005.3
Year:
2005
Language:
english
Journal:
Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
DOI:
10.1299/jsmelem.2005.3.1009
File:
PDF, 908 KB
english, 2005