MEMS PROCESS SIMULATION AND DEVICE ANALYSIS FOR AN...

IEEJ Transactions on Sensors and Micromachines 2001 Vol. 121; Iss. 6

MEMS PROCESS SIMULATION AND DEVICE ANALYSIS FOR AN ELECTRO-STATICALLY ACTUATED MICRO-MIRROR

Finch, Nora, Dutta, Sanghamitra, Kuhn, Jonathan, Marchetti, James, Yamada, Tomonori
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Volume:
121
Year:
2001
Language:
english
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.121.337
File:
PDF, 3.88 MB
english, 2001
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