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A newly-developed wide range molecular flow meter based on AAO leak element
Wang, Xudi, Wang, Hao, Hua, Yu, Cao, Qing, Bi, Hailin, Zhang, Jun, Yu, Zhenhua, Wei, WeiVolume:
71
Journal:
Flow Measurement and Instrumentation
DOI:
10.1016/j.flowmeasinst.2019.101686
Date:
March, 2020
File:
PDF, 1.09 MB
2020